MKS GV50A013202R6 Flow Controller Sccm Vcr Devicenet N2 200

( Brand: Mks ), ( Manufacturer Part Number: GV50A013202R6 ), ( Part Type: Flow Controller ), ( Maximum Flow Rate: 200 Sccm )

Review MKS Mass Flow Controller N2 200 Sccm Vcr Devicenet

The **MKS GV50A013202R6 Flow Controller** is a high-performance, precision-engineered mass flow controller designed for demanding applications in research, development, and industrial processes where accurate gas delivery is critical. This model is specifically tailored for nitrogen (N ) gas control with a nominal flow range of **200 standard cubic centimeters per minute (sccm)**, making it ideal for applications requiring fine-tuned, repeatable, and stable gas flow rates. Built upon MKS Instruments reputation for reliability and precision, this device integrates advanced thermal mass flow sensing technology with a robust control system to ensure consistent performance across a wide range of operating conditions. The **VCR (Vacuum Compatible Rotary) connection** facilitates seamless integration into vacuum systems, allowing for flexible and secure gas inlet and outlet configurations, while the **DeviceNet communication protocol** enables seamless integration into larger automation and control networks, enhancing system efficiency and scalability.

The GV50A013202R6 is engineered with a compact yet durable design, featuring a stainless steel body that ensures corrosion resistance and long-term durability in harsh environments. Its **digital control interface** provides real-time monitoring and adjustment capabilities, allowing users to set, display, and log flow rates with high accuracy and minimal drift. The device supports both analog (4-20 mA) and digital (DeviceNet) output signals, offering versatility in system integration and compatibility with various industrial controllers, PLCs, or data acquisition systems. Additionally, its **low-power consumption** and energy-efficient operation make it suitable for applications where power management is a consideration, while its **wide operating temperature range** ensures reliable performance in both laboratory and field environments.

For research and development applications, particularly in **vacuum coating, thin-film deposition, semiconductor manufacturing, or materials science**, this flow controller delivers the precision and stability required to achieve consistent experimental results. Its **calibration stability** and **fast response time** minimize process variability, ensuring that critical parameters remain within tight tolerances. The DeviceNet communication protocol further enhances its utility in automated workflows, enabling remote monitoring, automated adjustments, and integration with larger control systems for streamlined operation. Whether used in a controlled laboratory setting or deployed in an industrial production line, the MKS GV50A013202R6 Flow Controller represents a robust solution for applications where nitrogen gas flow must be metered with uncompromising accuracy and reliability.

**Pros and Cons of buying a MKS GVA50A013202R6 Flow Controller (N2, 200 SCCM, VCR, DeviceNet)**

### **Pros**

1. **Precision and Reliability** MKS is a well-established manufacturer in gas flow control, known for high-precision mass flow controllers (MFCs). The GVA50 series is designed for stable and accurate flow regulation, which is critical in applications like semiconductor manufacturing, vacuum coating, or chemical processing.

2. **Wide Range of Applications** The 200 SCCM (standard cubic centimeters per minute) range makes it suitable for small-scale processes where precise nitrogen (N2) flow control is required. It can handle both low and moderate flow rates effectively.

3. **VCR Connection** The VCR (Vacuum Compatible Refrigerant) fitting ensures a secure, leak-tight connection, which is essential in vacuum environments where contamination or gas leaks could compromise process integrity.

4. **DeviceNet Integration** The DeviceNet communication protocol allows for seamless integration with industrial automation systems, enabling remote monitoring, control, and data logging. This is particularly useful in automated manufacturing or research setups where real-time feedback is necessary.

5. **Durability and Longevity** MKS products are built for industrial use, with robust construction to withstand repeated use in demanding environments. The controller is likely designed for long-term reliability with minimal maintenance.

6. **Compatibility with Nitrogen (N2)** Since it is specifically designed for nitrogen, it avoids potential issues with corrosive or reactive gases that might damage other materials.

7. **Calibration and Accuracy** MKS controllers are factory-calibrated for high precision, reducing the need for frequent recalibration in most applications.

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### **Cons**

1. **Cost** MKS flow controllers are premium products, and this model may be more expensive than alternatives from less established brands. The price could be a significant investment, especially for small labs or startups.

2. **Limited Flow Range** At only 200 SCCM, this controller is not suitable for high-volume applications. Larger processes requiring higher flow rates would need multiple units or a different model.

3. **DeviceNet Dependency** While DeviceNet integration is a strength, it may require additional setup costs for compatible PLCs or automation systems. Users without existing DeviceNet infrastructure might need to invest in additional hardware or software.

4. **Potential Learning Curve** MKS controllers often come with proprietary software or interfaces. Users unfamiliar with MKS systems may require training to fully utilize its features, especially for advanced programming or troubleshooting.

5. **Maintenance and Spare Parts** As with any specialized equipment, finding replacement parts or technical support could be challenging if MKS service centers are not readily available in your region.

6. **Overkill for Simple Applications** If the application does not require the precision or automation capabilities of this controller, a simpler (and cheaper) mechanical or electronic flow controller might suffice.

7. **VCR Fitting Limitations** While VCR fittings are excellent for vacuum systems, they may not be compatible with all piping or tubing setups, requiring additional adapters or modifications.

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### **Conclusion**

The **MKS GVA50A013202R6** is an excellent choice for applications requiring **high-precision nitrogen flow control, DeviceNet integration, and vacuum compatibility**. It is ideal for **semiconductor processing, thin-film deposition, or automated research environments** where accuracy and reliability are paramount. However, its **higher cost, limited flow range, and specialized requirements** may make it less suitable for budget-conscious users or applications with lower flow demands.

If your application demands **precise gas control, industrial automation, and long-term reliability**, this controller is a strong recommendation. However, if you are working with **lower budgets, simpler setups, or higher flow rates**, you may want to consider alternatives such as:

- **Brooks or Aera (now part of MKS) lower-cost MFCs** for similar precision but at a reduced price.

- **Mechanical or thermal mass flow controllers** from brands like **Omega or Alicat** for simpler applications.

- **Pneumatic or electronic flow controllers** if DeviceNet integration is not a requirement.

Ultimately, the decision depends on your **specific needs, budget, and long-term operational requirements**. If the features align with your application, the MKS GVA50 is a dependable investment. Otherwise, evaluating alternatives may yield a more cost-effective solution.

Details:

MKS GV50A013202R6 Mass Flow Controller N2 200 sccm 4 VCR DeviceNet. 11-54D3-113355-BR-GX. This item is being sold as is, pictured. Shipping Services.

part #: gv50a013202r6 price

• $499.99

specifications pneumativalv:

• brand: Mks
• mpn: Gv50a013202r6
• part type: Flow Controller
• maximum flow rate: 200 Sccm

shipping pneumativalv:

• service: UPS Ground, USPS Priority Mail, UPS Next Day Air
• class: Standard, Expedited, One-day
• transit: 2-6 Days
• carrier: UPS, USPS
• cost: $0.00
• type: Calculated

seller pneumativalv:

• city: Baroda, Michigan
• rating: 100.0%
• # reviews: 27248

general pneumativalv:

• condition: For parts or not working
• Pump Flow Controllers > Flow Controllers Meters > Mass Flow Controllers

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offer pneumativalv:

• options: Ship-to-home
• availability: In Stock
• quantity: 1
• started: March 10, 2026
• best offers: True
• sold: 0

returns pneumativalv:

• policy: No Returns

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