MKS 1480A-28621 Flow Controller Gas Sccm 1482A N2 200

( Brand: Mks ), ( Manufacturer Part Number: 1480A-28621 ), ( Part Type: Flow Controller ), ( Maximum Flow Rate: 200 Sccm ), ( Country Of Origin: United States )

Review MKS Mass Flow Controller Gas N2 Range 200 Sccm

The **MKS 1480A-28621 1482A Series Mass Flow Controller (MFC)** is a precision-engineered, high-performance gas flow regulation device designed for demanding applications in research, semiconductor manufacturing, and industrial processes where accurate and reliable control of nitrogen (N ) or other gases is critical. Part of the robust 1482A series, this MFC combines advanced thermal mass flow sensing technology with intelligent digital control to deliver unmatched stability, repeatability, and long-term accuracy ideal for environments where even the slightest variation in flow rate could compromise experimental results or production quality. Built with a compact yet durable stainless steel housing, the 1480A-28621 is engineered to withstand harsh conditions, including high vibration and temperature fluctuations, ensuring consistent performance in dynamic laboratory or production settings. Its **200 SCCM (standard cubic centimeters per minute)** flow range makes it perfectly suited for medium-scale applications, such as plasma etching, thin-film deposition, or gas-phase chemical reactions, where precise metering of nitrogen whether for inert atmosphere protection, carrier gas delivery, or reactive gas dilution is essential. The device integrates a **thermal mass flow sensor** with a **high-precision PID (Proportional-Integral-Derivative) controller**, eliminating the need for external pressure or temperature compensation while maintaining an exceptional linearity of 0.5% of reading over its full range. This self-calibrating capability, coupled with its **RS-232 or digital communication interface**, allows for seamless integration into automated systems, enabling real-time monitoring, logging, and remote adjustments via compatible software. Additionally, the MFC features a **user-friendly front-panel display** with adjustable setpoints, flow readouts, and diagnostic indicators, making it accessible for both novice operators and experienced technicians. For enhanced safety and reliability, the unit includes **over-pressure protection, leak detection, and a fail-safe shutdown mechanism**, ensuring operational integrity even in the event of system malfunctions. Whether deployed in a cleanroom environment, a materials science lab, or an industrial gas processing facility, the MKS 1480A-28621 delivers the precision, durability, and versatility required to maintain optimal process control with confidence.

### **Pros and Cons of buying a MKS 1480A-28621 (1482A Series) Mass Flow Controller for N (200 sccm)**

1. **Precision and Accuracy** The MKS 1480A series is known for high-precision mass flow control, ensuring consistent and repeatable gas delivery at low flow rates (200 sccm). This is critical in applications requiring tight process control, such as semiconductor manufacturing, lab research, or thin-film deposition.

- **Semiconductor & Microelectronics** (etching, deposition, plasma processing)

- **Research & Development** (lab-scale gas delivery, chemical vapor deposition)

- **Medical & Pharmaceutical** (sterile gas handling, precise dosing)

- **Industrial Gas Processing** (where accurate N flow is essential)

3. **Digital Control & Calibration** Features built-in calibration and digital readouts, reducing human error and improving reproducibility. Some models allow for remote monitoring and control via interfaces like RS-232 or USB.

4. **Compatibility with N and Other Gases** Works well with nitrogen (N ) and other clean, non-corrosive gases, making it versatile for different experimental setups.

5. **Durability & Reliability** MKS Instruments is a well-established brand with a reputation for robust, long-lasting equipment. The 1480A series is designed for continuous operation, reducing downtime.

6. **Low Flow Range Suitability** At 200 sccm, it is ideal for applications where high precision at low flow rates is required, such as in some CVD (Chemical Vapor Deposition) or plasma etching processes.

7. **Compatibility with MKS Systems** If you already use other MKS components (e.g., pressure controllers, vacuum systems), this flow controller integrates seamlessly, simplifying system design and maintenance.

8. **Calibration Stability** The thermal mass flow sensing technology used in this model provides stable calibration over time, reducing the need for frequent recalibration.

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1. **High Initial Cost** MKS Instruments is a premium brand, and the 1480A series is not the most budget-friendly option. For basic applications, cheaper alternatives (e.g., some digital mass flow controllers from other manufacturers) may suffice.

2. **Maintenance & Repair Costs** While durable, MKS equipment can be expensive to repair or service, especially if authorized service centers are required. Some users report higher maintenance costs compared to mid-range brands.

3. **Complexity for Beginners** The digital interface and calibration features may be overwhelming for users without prior experience in gas flow control systems. Setup and troubleshooting may require technical support.

4. **Limited Physical Size Options** The 1480A series may not be compact enough for space-constrained setups. Some alternatives offer more compact designs without sacrificing performance.

5. **Potential for Overkill in Simple Applications** If you only need basic gas flow control (e.g., in a small lab experiment), a simpler mechanical or digital flow controller might be sufficient, reducing unnecessary complexity and cost.

6. **Dependency on Gas Purity** While it works well with clean N , contaminated or humid gases could affect performance over time, requiring additional filtration or conditioning.

7. **Software & Interface Learning Curve** If the controller requires proprietary software for calibration or logging, users may need time to learn the interface, which could slow down initial setup.

8. **No Built-in Overpressure Protection (in some models)** Depending on the exact variant, there may be no inherent protection against sudden pressure spikes, which could damage the sensor if not properly safeguarded in the system design.

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The **MKS 1480A-28621 (1482A series) mass flow controller for N at 200 sccm** is an excellent choice for applications requiring **high precision, reliability, and integration with advanced gas control systems**. Its strengths lie in its **accuracy, digital calibration, and compatibility with demanding industries** like semiconductor manufacturing and research labs. However, the **high cost, complexity, and potential overkill for simpler applications** make it less ideal for basic or budget-conscious users.

If your application demands **critical process control, repeatability, and long-term stability**, this controller is a strong recommendation. For **lower-budget or simpler setups**, alternatives from brands like **Alicat, Bronkhorst, or Omega** may offer comparable performance at a lower cost.

- You work in **semiconductor, research, or medical fields** where precision is non-negotiable.

- You already use **MKS systems** and need seamless integration.

- Your budget allows for a **premium, high-reliability controller**.

- You require **low-flow accuracy (200 sccm) with digital calibration**.

- You need a **lower-cost solution** and can tolerate slightly less precision.

- Your application is **non-critical** and doesn t require MKS-level accuracy.

- You prefer **simpler, easier-to-use controllers** with minimal setup complexity.

For most **high-end research or industrial applications**, the MKS 1480A is a **solid investment**. For **educational labs or basic experiments**, exploring mid-range brands may provide better value.

Details:

Model: 1480A-28621, Gas: N2, Range: 200 SCCM, The unit is used, taken from a working system. I will gladly combine shipping whenever possible to save you money Range: 200 SCCM. MKS 1480A MASS FLOW CONTROLLER GAS N2 RANGE 200 SCCM.

part #: 1480a28621 prices

• $149.90-$599.00

specifications pneumativalv:

• brand: Mks
• mpn: 1480a-28621
• part type: Flow Controller
• maximum flow rate: 200 Sccm
• country of origin: United States

returns pneumativalv:

• policy: No Returns

seller pneumativalv:

• city: Hillsborough, New Jersey
• # reviews: 186
• rating: 100.0%

payments pneumativalv:

• credit card: Diners-club
• other
• wallet: Apple-pay

shipping pneumativalv:

• class: Standard
• carrier: USPS
• type: Calculated
• cost: $8.35
• service: USPS Ground Advantage
• transit: 4-8 Days

general pneumativalv:

• condition: Used
• Pump Flow Controllers > Flow Controllers Meters > Mass Flow Controllers

offer pneumativalv:

• started: March 20, 2026
• quantity: 1
• availability: In Stock
• sold: 0
• options: Ship-to-home

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