MKS INSTRUMENTS 1479A13CR1AM Mfc Gas Sccm N2 1000

( Brand: Mks Instruments ), ( Manufacturer Part Number: 1479A13CR1AM )

Review MKS INSTRUMENTS Mfc Gas N2 Range 1000 Sccm

The **MKS 1479A13CR1AM Mass Flow Controller (MFC) for Gas (N , 1000 sccm)** is a high-performance, precision-engineered instrument designed for accurate and reliable control of gas flow in demanding laboratory, industrial, and research applications. Part of MKS Instruments renowned **1479 Series**, this digital mass flow controller is optimized for low to medium flow rates, making it an ideal choice for processes requiring precise metering of gases such as nitrogen (N ) at a nominal flow rate of up to **1000 standard cubic centimeters per minute (sccm)**. Built with a **thermal mass flow sensing technology**, the 1479A13CR1AM ensures exceptional linearity, repeatability, and stability across a wide range of operating conditions, delivering consistent performance even in dynamic environments where flow demands fluctuate.

The controller features a **compact, modular design** with a robust stainless steel housing, providing durability and resistance to corrosion, vibration, and thermal fluctuations critical attributes for applications in semiconductor manufacturing, materials research, thin-film deposition, or gas-phase chemical reactions. Its **digital interface** supports seamless integration with laboratory automation systems, PLCs, or custom control software via **RS-232 or USB communication protocols**, enabling real-time monitoring, logging, and remote adjustments. The **CR1AM model** specifically incorporates a **corrosion-resistant coating** on internal components, extending the device s lifespan in environments where aggressive or humid gases may be present.

At the heart of the 1479A13CR1AM is its **high-precision thermal mass flow sensor**, which operates on the principle of thermal conductivity to measure gas flow with unmatched accuracy ( 1% of reading or better). This technology eliminates the need for pressure or temperature compensation in many applications, simplifying system design while maintaining reliability. The controller s **wide turndown ratio** allows for fine-tuned control across a broad range of flow rates, from sub-sccm levels up to its maximum capacity, ensuring versatility for both low-flow calibration tasks and higher-demand processes. Additionally, its **low power consumption** and **energy-efficient operation** make it suitable for applications where power management is a consideration.

For enhanced usability, the 1479A13CR1AM includes a **backlit LCD display** with intuitive navigation, allowing operators to set flow rates, monitor real-time readings, and configure parameters such as units (sccm, SCCM, or other gas-specific units), alarm thresholds, and calibration settings. The device also supports **multiple gas types** beyond nitrogen, including inert gases like argon (Ar), helium (He), or reactive gases (with appropriate tubing and safety considerations), making it a versatile tool for diverse experimental setups. Safety is further reinforced by features such as **over-pressure protection**, **flow limiting**, and **fail-safe shutdown protocols**, ensuring operator and equipment protection in the event of malfunctions or unexpected conditions.

Ideal for applications in **semiconductor fabrication, materials science, chemical vapor deposition (CVD), plasma etching, or gas chromatography**, the MKS 1479A13CR1AM combines precision engineering with user-friendly functionality to deliver a dependable solution for gas flow control. Whether used in a controlled laboratory environment or integrated into a larger automated system, this mass flow controller exemplifies MKS Instruments commitment to innovation and performance, providing researchers and engineers with the tools they need to achieve consistent, high-quality results in their work.

### **Pros and Cons of buying a MKS 1479A13CR1AM MFC (Mass Flow Controller) for Gas (N , 1000 sccm)**

#### **Pros**

1. **Precision and Reliability**

The MKS 1479A13CR1AM is a thermal mass flow controller (MFC) designed for high-accuracy gas flow regulation, particularly in research, semiconductor, and industrial applications. It uses thermal dispersion technology, which provides stable and repeatable flow control even at low flow rates (down to 0.1 sccm). This makes it ideal for processes requiring fine-tuned gas delivery, such as thin-film deposition, etching, or plasma treatment.

2. **Wide Range of Compatibility**

The unit supports multiple gases, including nitrogen (N ), argon (Ar), oxygen (O ), and others, with proper calibration. Its 1000 sccm (standard cubic centimeters per minute) range is suitable for moderate to high-flow applications without the need for additional controllers. The CR1AM model is designed for cleanroom environments, ensuring compatibility with vacuum and process systems where contamination must be minimized.

3. **Digital Control and Interface**

The 1479 series features a digital interface (RS-232 or USB, depending on the model variant), allowing for remote monitoring and control via PC software. This integration with process control systems enhances automation and data logging capabilities, which is valuable in research and manufacturing settings.

4. **Durability and Calibration Stability**

MKS Instruments is a well-established manufacturer known for robust, long-lasting equipment. The 1479A13CR1AM is built for reliability, with minimal drift over time, reducing the need for frequent recalibration. This is particularly important in continuous production environments where downtime for maintenance is costly.

5. **Cleanroom and Vacuum Compatibility**

The CR1AM designation indicates that this MFC is designed for cleanroom use, with materials and construction that prevent particulate contamination. It can interface with vacuum systems, making it versatile for applications like sputtering, CVD (chemical vapor deposition), or PVD (physical vapor deposition).

6. **User-Friendly Operation**

The controller includes a front-panel display for manual adjustments, and its software (e.g., MKS FlowPro) provides intuitive control for setting flow rates, ramp rates, and other parameters. This reduces the learning curve for operators compared to analog or more complex digital systems.

7. **Support and Warranty**

Purchasing from MKS or an authorized distributor typically includes warranty coverage and access to technical support. This can be crucial for troubleshooting or addressing issues that may arise during operation.

---

#### **Cons**

1. **High Initial Cost**

MKS MFCs are premium-priced compared to generic or lower-end brands. The 1479A13CR1AM, while not the most expensive in the MKS lineup, still represents a significant investment, especially for small labs or startups with limited budgets. The cost may be justified by its performance, but it can be prohibitive for non-critical applications.

2. **Limited Flow Range for Some Applications**

While the 1000 sccm range is adequate for many processes, it may be insufficient for high-throughput industrial applications (e.g., large-scale semiconductor manufacturing). In such cases, multiple units or higher-range MFCs (e.g., 10,000 sccm or more) would be required, increasing complexity and cost.

3. **Calibration and Maintenance Requirements**

Although the 1479 series is stable, it still requires periodic calibration to maintain accuracy, especially if used with gases other than the primary calibration gas (e.g., nitrogen). Calibration can be time-consuming and may require specialized equipment or external services, adding to operational costs.

4. **Software Dependency**

Full functionality relies on MKS s proprietary software (e.g., FlowPro), which may not be compatible with all operating systems or custom control systems. This can create integration challenges if the user s setup requires third-party software or legacy systems.

5. **Potential for Overkill in Low-Budget Settings**

For applications where lower precision or simpler control is acceptable (e.g., basic lab experiments or non-critical gas delivery), a less expensive MFC from brands like Alicat, Bronkhorst, or even analog controllers might suffice. Investing in an MKS unit may not be cost-effective in such cases.

6. **Part Replacement and Longevity**

While MKS equipment is durable, parts (e.g., sensors, electronics) may become obsolete over time, leading to higher replacement costs or difficulty finding compatible components. This is less of an issue with newer models but can be a concern for older or discontinued units.

7. **Learning Curve for Advanced Features**

The digital interface and automation capabilities, while powerful, may require training for operators unfamiliar with flow control systems. Misconfiguration could lead to process errors or equipment damage, particularly in sensitive applications like semiconductor fabrication.

---

### **Conclusion**

The **MKS 1479A13CR1AM MFC** is a high-quality, precision instrument well-suited for applications requiring reliable, accurate gas flow control in research, cleanroom environments, or industrial processes. Its strengths lie in its stability, digital control, cleanroom compatibility, and integration capabilities, making it ideal for critical applications where consistency and automation are paramount.

However, its high cost, potential overkill for less demanding applications, and maintenance requirements must be carefully considered. If budget is a constraint or the application does not require its level of precision, alternative MFCs from other manufacturers may offer comparable performance at a lower price.

---

### **Recommendation**

- You require **high-precision gas flow control** for applications like thin-film deposition, etching, or plasma processing.

- Your workflow benefits from **digital integration and automation** (e.g., real-time monitoring, scripting, or PC control).

- You operate in a **cleanroom or vacuum environment** where contamination control is critical.

- You prioritize **long-term reliability and minimal drift**, justifying the higher upfront cost.

- Your budget can accommodate the investment, and the MFC will be used extensively enough to amortize the expense.

- Your application does not require **sub-sccm precision** or can tolerate lower-cost MFCs (e.g., Alicat, Bronkhorst).

- You are working with **limited budgets** and can achieve similar results with simpler, less expensive controllers.

- The **flow range is insufficient** for your needs (e.g., >1000 sccm), and you would need additional units or higher-range models.

- You lack **technical support or training** for advanced features, as misconfiguration could impact results.

For most **research labs, semiconductor processing, or industrial applications demanding accuracy**, the MKS 1479A13CR1AM is a strong choice. For less critical or budget-sensitive applications, evaluating other brands may yield a better cost-performance balance. Always compare the specific requirements of your process with the MFC s specifications before purchasing.

Details:

Weldon't ship to any illegal by US LAW or restricted destinations. Five-one-two-nine-two-eight-five-five-five-three Corporate Office. Your Source for Spares Chiller Repairs. Affinity, Baltic's, Ne slab, SMC or Thermos Fisher chillers.

Applied Materials, Canon, DNS, Ebro,Edwards, ENI, Masonic's, KLA-Tenor, LAM, Nikon, Novellas, Parametric, SVG, TEL,Variant and more. Two-zero-eight-nine-eight-two-one-eight-six-two Direct Line. SN: 001827015. If it snot pictured or in the , then is not included.

Items over 150 lbs. Pallet/crating fees apply. Pictured items, only, shall be included in the listing. Please Contact.

part #: 1479a13cr1am price

• $250.00

specifications pneumativalv:

• brand: Mks Instruments
• mpn: 1479a13cr1am

returns pneumativalv:

• policy: Returns Accepted
• time: 30 Days
• paid by: Buyer
• method: Money back

seller pneumativalv:

• # reviews: 1300
• city: Buda, Texas
• rating: 99.7%

offer pneumativalv:

• availability: In Stock
• sold: 0
• options: Ship-to-home
• quantity: 1
• best offers: True
• started: February 19, 2026

shipping pneumativalv:

• service: FedEx Ground Economy, UPS Ground Saver, UPS Ground, FedEx Ground / FedEx Home Delivery
• type: Calculated
• class: Economy, Standard
• transit: 4-7 Days
• carrier: FedEx, UPS
• cost: $9.66

general pneumativalv:

• Pump Flow Controllers > Flow Controllers Meters > Mass Flow Controllers
• condition: Used

payments pneumativalv:

• credit card: Discover
• other
• wallet: Apple-pay

Mks Instruments 1479A13CR1AM Is Similar To:

• 0248a-01000rv Mks Type Range 1000 (35.6% similar) No means to test. Reach out to us. All statements regarding products and their configurations are made to the best of our ability with assumption that buyer is knowledgeable proficient in use this type equipment. No manuals,no standard power cords, even if it appears in the photo, accessories, ...(December 4th, 2017)
• 0248ac-10000rv Mks Solenoid Valve Sccm Used (22% similar) Some exceptions may apply. Let us know whats going on and we ll provide you a FedEx account to return product. Return PRODUCT3. Used, but in good working condition. Removed from closed plant. Mks solenoid valve 0248AC-10000RV sccm condition: new, in box no old inventory used, but good working ...(July 12th, 2018)
• 0258b-00200sv Mks Mass Flow Meter Sccm (31.6% similar) Mks mass flow meter - n2 sccm 1259C-00100RV removed from working environment at local tech company that no longer requires it. See pictures for details. Shipping within us continent lower 48 states only...(April 11th, 2018)
• 0258c-00050rv Mks Instruments Mass Flow Meter Vcr Gas Sccm Range (52.9% similar) Included: 1 Mks Instruments 0258C-00050RV mass flow meter 15 pin connection 50 sccm range specifications: manufacturer: model: range: gas: n2 referenced to c and 750 tore inlet outlet connections: 2 electrical connection: type male input power: 24 CDC thread diameter. The mass flow meter is in used ...(July 20th, 2018)
• 0358c-02000rv Mks Range Sccm Gas (31.5% similar) This item is not tested sold as is, where. Basic information maker: Mks model: mass flow meter n: 0358C-02000RV item conditions: new condition...(June 20th, 2018)
• 11259b-00100sv Mks Instruments Mass Flow (41.2% similar) Sold as is for parts or repair. No means to test. Marked as working sporadically. May have other unknown issues. All statements regarding products and their configurations are made to the best of our ability with assumption that buyer is knowledgeable proficient in use this type equipment. No ...(February 6th, 2018)
• 1153 Mks Vapor Source Mfc Mas Flow Controller Gas (35.8% similar) Cosmetic condition: unit is in good condition, it does show some moderate scratches and scuffs on the surface. Shipping charges seem too high...(October 19th, 2018)
• 1153a-15215 Mks Mass Flow Controller Sccm (32.7% similar) If a lift gate is needed for delivery, please let us know upon quote request...(June 7th, 2019)
• 1159a-00500sv Mks Instruments Mass Flow (41.7% similar) Mks Instruments mass flow controller note: was pulled from working equipment, model: 11599AGAS: N2FLOW rate: 500 sccm used, removed equipment. Applied materials spare parts. Please e-mail with any questions...(December 23rd, 2017)
• 1159b-00020rv Mks Range Sccm Gas Controller (28% similar) Mks 1159B-00020RV range 20 sccm gas n2 mass-Flo controller...(August 1st, 2018)
• 1159b-00020rv-spcal Mks Sccm Mass Flow Controller (18.9% similar) If a lift gate is needed for delivery, please let us know upon quote request...(June 18th, 2019)