MKS INSTRUMENTS 1179A-21660 Flo Controller Sccm Nitrogen

( Brand: Mks Instruments ), ( Manufacturer Part Number: 1179A-21660 ), ( Part Type: Controller ), ( Maximum Flow Rate: 2000 Sccm ), ( Gas Media: N2 Nitrogen ), ( Country Of Origin: United States )

Review MKS INSTRUMENTS Mass flo Controller Sccm Nitrogen

The **MKS 1179A-21660 Mass-Flo Digital Mass Flow Controller (MFC)** is a high-performance, precision-engineered instrument designed for accurate and reliable gas flow regulation in demanding laboratory, semiconductor, and industrial applications. Part of MKS Instruments renowned **Mass-Flo 2000 series**, this controller is specifically configured for nitrogen (N ) with a nominal flow range of **0 to 21660 standard cubic centimeters per minute (sccm)**, making it ideal for processes requiring precise gas delivery in the mid-to-high flow regime. Built upon MKS s proprietary **thermal mass flow sensing technology**, the 1179A ensures exceptional accuracy, repeatability, and stability across a wide range of operating conditions, with a typical accuracy of ** 1% of reading 1 digit** and a repeatability of ** 0.2% of reading**. The controller features a **digital interface** with an **RS-232 port** for seamless integration with process control systems, enabling remote monitoring, programming, and data logging for enhanced automation and efficiency.

The robust **1179A chassis** houses a **high-precision thermal mass flow sensor** paired with a **digital signal processor (DSP)**, which continuously measures the mass flow rate of nitrogen with minimal drift and excellent long-term stability. This design eliminates the need for pressure or temperature compensation in most applications, as the Mass-Flo 2000 series inherently corrects for these variables, ensuring consistent performance even in varying environmental conditions. The controller s **wide operating range** from **0 to 21660 sccm** accommodates a broad spectrum of applications, including **plasma etching, chemical vapor deposition (CVD), thin-film deposition, gas mixing, and atmospheric pressure processes**, where precise nitrogen flow control is critical. Additionally, the **adjustable turndown ratio** of up to **100:1** allows for fine-tuned flow modulation, whether delivering small trickle flows or high-volume gas streams with equal precision.

For enhanced usability and safety, the **1179A-21660** incorporates **MKS s proprietary Mass-Flo technology**, which includes **auto-zeroing, self-diagnostics, and over-range protection** to prevent damage from excessive backpressure or flow spikes. The controller s **front-panel display** provides real-time readouts of flow rate, setpoint, and system status, while the **configurable keypad** allows for intuitive on-the-fly adjustments. Optional **analog (4-20 mA) and digital (Pulse/Digital) outputs** further expand its versatility, enabling integration into larger control networks or standalone setups. The unit is also **compatible with MKS s Mass-Flo software tools**, such as **Mass-Flo Commander**, which facilitates advanced programming, logging, and troubleshooting via a user-friendly interface.

Constructed with **industrial durability in mind**, the Mass-Flo 2000 series is built to withstand the rigors of laboratory and manufacturing environments. The controller s **compact yet sturdy enclosure** is designed for easy mounting on benchtops, racks, or directly into process chambers, while its **low-power consumption** ensures efficient operation without compromising performance. Whether used in **semiconductor fabrication, materials research, or specialized industrial processes**, the **MKS 1179A-21660** delivers the reliability, precision, and flexibility required to maintain optimal process control. With its **superior accuracy, wide flow range, and seamless integration capabilities**, this mass flow controller stands as a cornerstone for applications where nitrogen delivery must be both consistent and dependable.

**Pros and Cons of buying a MKS 1179A-21660 Mass-Flo Controller (2000 SCCM Nitrogen)**

### **Pros**

1. **Precision and Reliability** The MKS Mass-Flo controller is a well-established brand in gas flow control, known for its high accuracy and repeatability. It uses thermal mass flow technology, which is ideal for applications requiring precise gas delivery, such as semiconductor manufacturing, thin-film deposition, or laboratory research.

2. **Wide Range of Applications** The 2000 SCCM (standard cubic centimeters per minute) flow range makes it suitable for moderate to high-flow applications, including:

- **Semiconductor processing** (e.g., CVD, PECVD, sputtering)

- **Material science research** (e.g., plasma etching, chemical vapor deposition)

- **Laboratory gas delivery** (e.g., gas mixing, calibration standards)

3. **Digital Control and Integration** The device supports digital communication (e.g., RS-232, RS-485, or USB depending on the model variant), allowing for easy integration with process controllers, data acquisition systems, or automated workflows. This is particularly useful in industrial or research settings where remote monitoring and control are required.

4. **Stable Performance with Nitrogen** Nitrogen is a common process gas, and the Mass-Flo controller is optimized for stable operation with inert or reactive gases. Its thermal mass flow sensing ensures consistent performance even with slight variations in upstream pressure or temperature.

5. **Long-Term Durability** MKS instruments are built for industrial use, with robust construction and components designed for extended lifespans, reducing the need for frequent replacements or recalibrations.

6. **Calibration and Traceability** MKS provides calibration services and certifications, ensuring traceability to national standards (e.g., NIST), which is critical for industries with strict regulatory requirements (e.g., semiconductor manufacturing).

7. **Compatibility with MKS Ecosystem** If you already use other MKS products (e.g., mass flow meters, controllers, or vacuum systems), this controller will integrate seamlessly, simplifying system maintenance and support.

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### **Cons**

1. **High Initial Cost** The MKS Mass-Flo controller is a premium device, and the 2000 SCCM model for nitrogen will likely cost significantly more than basic analog or mechanical flow controllers. The price may be prohibitive for small labs, startups, or non-industrial applications where lower-cost alternatives suffice.

2. **Complexity for Basic Applications** If your application only requires simple, low-precision gas flow control (e.g., a small-scale lab experiment), the advanced features of the Mass-Flo may be unnecessary. A simpler, cheaper device (e.g., a bubble flow meter or a basic digital mass flow controller from a different brand) could achieve the same result with less complexity.

3. **Maintenance and Calibration Requirements** Like all high-precision instruments, the Mass-Flo requires periodic calibration to maintain accuracy. This may involve sending the unit to MKS for servicing or performing in-house calibrations, which can add to long-term operational costs.

4. **Limited Flow Range for Some Applications** While 2000 SCCM is adequate for many processes, it may be insufficient for high-throughput industrial applications (e.g., large-scale CVD reactors or high-deposition-rate sputtering). In such cases, a higher-flow model (e.g., 10,000 SCCM or more) would be necessary.

5. **Dependency on MKS Support** If you encounter issues, troubleshooting or repairs may require contacting MKS directly, which could involve wait times or specialized knowledge. Smaller brands or generic controllers might offer more accessible customer support.

6. **Power and Interface Requirements** The controller may require specific power supplies or communication interfaces (e.g., certain software drivers or protocols). Ensuring compatibility with your existing setup could involve additional setup work or compatibility checks.

7. **Potential for Overkill in Low-Budget Environments** In academic or hobbyist settings where budgets are tight, the cost-benefit ratio may not justify the purchase. Alternatives like cheaper digital mass flow controllers (e.g., from Omega, Alicat, or Bronkhorst) may offer similar performance at a fraction of the cost.

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### **Ending Conclusion**

The **MKS 1179A-21660 Mass-Flo Controller** is an excellent choice for **high-precision gas flow control in industrial, research, or semiconductor applications** where accuracy, reliability, and integration with advanced systems are critical. Its thermal mass flow technology, digital control capabilities, and compatibility with MKS ecosystems make it a robust investment for professionals who demand consistent performance. However, its **high cost, complexity, and maintenance requirements** may not be justified for basic or low-budget applications where simpler, lower-cost alternatives would suffice.

### **Recommendation**

- You are working in **semiconductor manufacturing, material science research, or industrial gas processing** where precision and reliability are non-negotiable.

- Your application requires **digital control, remote monitoring, or integration with automated systems**.

- You already use **MKS equipment** and want seamless compatibility.

- You can justify the **long-term cost** based on the value of accuracy and durability.

- Your budget is limited, and you only need **basic gas flow control** (e.g., for a small lab or educational setting). In this case, explore **Alicat, Omega, or Bronkhorst mass flow controllers**, which offer similar digital control at a lower price.

- Your application does not require **high precision** (e.g., simple nitrogen purging or low-flow experiments), where a **bubble flow meter or mechanical regulator** may be sufficient.

- You prioritize **ease of use and lower maintenance** over cutting-edge technology.

For most **industrial or research-grade applications**, the MKS Mass-Flo is a **strong, long-term investment**. For **budget-conscious or low-precision needs**, evaluating other brands or simpler controllers would be more cost-effective.

Details:

This was removed from a working Paganism Sex ELAN DRC Plus.Item has some minor cosmetic damage consistent with use and age. This is a MKS Instruments Mass-Flo Controller 1179A-21660.

part #: 1179a21660 prices

• $479.20-$799.99

specifications pneumativalv:

• brand: Mks Instruments
• mpn: 1179a-21660
• part type: Controller
• maximum flow rate: 2000 Sccm
• gas media: N2 Nitrogen
• country of origin: United States

shipping pneumativalv:

• cost: $12.00
• service: USPS Ground Advantage
• type: Fixed
• class: Standard
• transit: 4-11 Days
• carrier: USPS

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• # reviews: 1440
• city: Las Vegas, Nevada
• rating: 100.0%

offer pneumativalv:

• options: Ship-to-home
• availability: In Stock
• quantity: 2
• started: April 28, 2026
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• Pump Flow Controllers > Flow Controllers Meters > Mass Flow Controllers
• condition: Used

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